Features
Highly Stable Optical Path Laser Interferometer
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This measuring machine adopts an optical fiber-based laser interferometer, one of Tokyo Seimitsu's constituent technologies, and incorporates a newly developed highly stable optical path laser interferometer having a resolution of 0.31 nm.
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This system features a dynamic range as well as a resolution ratio of 42,000,000:1.This means that in a single trace you can evaluate contour profiles in wide ranges and also hidden fine surfaces.